This target provides a highly accurate reference for feature sizes of circles and squares and is ideal for testing the accuracy of non-contact metrology systems, especially those vulnerable to distortion and blooming. The precision pattern is formed in Low Reflection Chromium on a stable Float Glass substrate in standard microscope slide format. The low reflection pattern surface provides high contrast against a light background, ideal for diffuse or coaxial illumination applications. The pattern is applied to the first surface and features both circles and squares in 0.5mm and whole number sized increments from 1mm to 10mm. The Positive Target features an opaque pattern on a clear background whereas the Negative Target features a clear pattern on an opaque background.